型号 Model NumberM

6×3.5×32

－

Nut  U

15

22

34

54

28

42

46

58

R

3

5

6

12

5

5

8

10

Washer  T

16

28

38

54

28

42

52

58

S

1

2

2

3

2

2

3

2

允许传送扭矩
Torque capacity
[ kg· cm]

9.5

15.2

76

570

9.5

15.2

76

123.5

耐真空度
Degree of vacuum
pressure [Pa]

10^-6

允许氦泄漏量
Leakage rate (He)
[Pa.m³/sec]

<10^{- 12}

使用温度范围
Temperature range
(℃)

0～80
(超出该范围可采用水冷结 构)
(Adding water cooling structure if it is beyond this temperature range.)