型号Model Number
VGHFF020NN
VGHFF025NN
VGHFF030NN
VGHFF040NN
VGHFF050NN
A
20
25
30
40
50
B
123.5
126
130.5
141
147.5
C
109.5
112
116.5
125
131.5
D
78
90
96
106
132
E
44
49
54
69
79
F
10
12
J
118
145
158
185
K
N
PD100/4-φ10
PD120/4-φ10
PD135/4-φ12
PD160/8-φ12
耐真空度
Degree of vacuum pressure [Pa]
10-6
允许氦泄漏量
Leakage rate(He)[Pa.m3/sec]
<10-12
使用温度范围
Temperature range(℃)
0～80
(超出该范围可采用水冷结构)
(Adding water cooling structure if it is beyond this temperature range.)